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Etched silicon tab and groove assembly
can be used to assembly small structures with tight mechanical
tolerance, as in this electrostatic lens assembly.
Photo credits: Wise, Gingerich, Jamieson,
Niemann, Roman |
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Implantable Neural Probe
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Silicon flow restrictor
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Hematology Analyzer on a Chip
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MEMS Field Emitter triode for
Residual Gas Analysis
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Silicon Ion Lens assembly for
miniature mass spectrometer
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© 2009 SCIENTIFIC & BIOMEDICAL MICROSYSTEMS |
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