MEMS Field Emitter Triode for Residual Gas Analysis




Carbon nanotube-based MEMS field emitter for use in miniature analytical instruments (e.g. mass spectrometers) where high pressure operation is desired.

Photo credits: Jamieson, Delzeit, Roman,Getty

 


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MEMS Field Emitter triode for Residual Gas Analysis

 


Silicon Ion Lens assembly for miniature mass spectrometer

 
   
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